• All sections
• H - Electricity
• H01L - Semiconductor devices not covered by class
• H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components

Patent holdings for IPC class H01L 21/67

Total number of patents in this class: 19815

10-year publication summary

Principal owners for this class